In memoriam: Mikio Takai

Prof. Emeritus Mikio Takai

Mikio Takai received BE, ME, and DE (phD) in 1971, 1973, and 1976 from Faculty of Engineering Science, Osaka University, Toyonaka, Osaka, Japan. He was awarded by Alexander von Humboldt Foundation and joined Fraunhofer Institute for Solid State Technology, in Munich, Germany until 1980.

Since 1971 he worked on ion implantation in semiconductors and ion beam analysis. In particular, soft error reliability (single event upset) of SOI DRAMs was studied intensively using a nuclear microprobe with industry projects at Research Center for Quantum Science and Technology in Osaka University. He was invited by Uni-Erlangen, Germany, as a visiting professor in 1987 – 1988. Since 1993 he started to study field electron emission from various materials and structures.

He specialized in beam processes and contributed greatly to the development of the field of vacuum nanoelectronics through his innovative research that makes full use of laser, ion beam, and electron beam process technologies, including laser cleaning of field emitter surfaces, activation of carbon nanotube cold cathodes by laser irradiation, and the development of a field emitter prototype process using in-situ ion and electron beam processes.

He organized IVMC 2003 in Osaka and acted as a chairman of International Steering Committee (ISC) members in 2005 – 2010.

He organized domestic research project teams for NEDO and KAKENHI and he acted as chairman of the JSPS 158th committee on Vacuum Nanoelectronics in 2004-2013.

Prof. Emeritus Mikio Takai was a life Fellow member of the Japan Society of Applied Physics.

We will certainly miss him. Thank you.